S3IC 2024: Single-Molecule Sensors and NanoSystems International Conference

Imec

Sanjin Marion (Principal Member of Technical Staff, imec), will give a presentation on 'solid state nanopores – fab to lab':

Nanopore research is blossoming upon the success of biological nanopores for DNA sequencing applications. Solid-state nanopores have been left behind due to reliability and large-scale manufacturability issues. Imec employs its state-of-the-art semiconductor manufacturing facilities to alleviate these issues and to enable products based on solid-state nanopores. To that end, imec is leveraging its lithography expertise to provide the first truly upscalable solid-state nanopore platform which can be integrated with other silicon nanostructures. We have enabled lithographic nanopore fabrication using deep UV lithography in our 200 mm fab, targeting a pore dimension of 25 nm, and are currently developing an advanced lithography process in our 300 mm fab targeting sub-10 nm nanopores. We aim to demonstrate that the imec lithographic nanopore provides a platform for future application work. To that end, we developed a high-throughput measurement platform allowing us to characterize hundreds of chips per day. Using data science, we analyze thousands of nanopore chips to infer nanopore wettability, and its subsequent performance for translocation experiments. We show results of wafer-to-wafer variability in the 200 mm imec pilot line, demonstrating a stable whole-wafer nanopore release process. We show our devices can provide DNA-scaffold based structure translocations comparable to standards in the field. Our next steps are enabling robust pore sensing over the span of a day, and en masse characterization of surface coatings and translocation experiments.

Contributors: 

• Eric Beamish, Researcher, imec
• Wouter Botermans, Researcher, imec
• Wouter Renckens, R&D Project Engineer, imec
• Florian De Samblanx, Process Assistant, imec
• Ayesha Walikar, Process Engineer, imec
• Wannes Peeters, R&D Engineer, imec
• Manoj Jayshankar, R&D Engineer, imec
• Bert Du Bois, R&D Engineer, imec
• Natan Biesmans, R&D Architect, imec
• Matteo Pero Cartiglia, Researcher, imec
• Simone Severi, VP R&D, imec
• Pol Van Dorpe, Fellow, imec
• Ashesh Ray Chaudhuri, Program Manager, imec
• Sanjin Marion, Principal Member of Technical Staff, imec

About

This conference will bring together researchers in the rapidly advancing field of Single Molecule Sensors and nanoSystems on October 28-30, 2024 in Paris. The conference focuses on the most recent advances in micro and nano-sensing techniques that have either demonstrated single-molecule detection or that can advance or contribute towards single-molecule detection capability on sensor chips in the longer term.

Topics:

• Single-Molecule Spectroscopy, Imaging, and Forces
• Micro/Nanofluidics/Chemical control at the Nanoscale
• Molecular Machines, Synthetic Biology, and DNA Origami
• Single-molecule Sensors and Sequencers
• Molecular Electronics
• From Quantum Sensing to Quantum Biology
• Nanothermodynamics in experiments and theory
• Computational approaches

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